Minisize two-dimension scan mirror with piezoresistance sensor
Title：
Minisize two-dimension scan mirror with piezoresistance sensor
Application Number：
 200710118471
Application Date：
 2007/07/06
Announcement Date：
 2007/12/05
Pub. Date：
Publication Number：
 101082702
Announcement Number：
Grant Date：
Granted Pub. Date：
ApplicationType：
 Invention
State/Country：
 11[]
IPC：
 G02B 26/10G01D 5/16
Applicant(s)：
 Tsinghua University
Inventor(s)：
 You Zheng, Zhang Chi, Zhang Gaofei, Yu Shijie
Key Words：
 two-dimension, scan mirror, piezoresistance, sensor
Abstract：
 The invention discloses a mini two-dimensional scanning telescope with piezoresistive transducer in the micro-scanning technical and MOEMS technical domain, which comprises the following parts: reflective lens integrated on the monocrystalline silicon, inertia generator, excited block, flexible beam and piezoelectric driver to bind the excited block, wherein the upper and lower ends of the flexible beam connect the reflecting lens and excited block; the sine DC pulse voltages with two different frequencies is superimposed on the piezoelectric driver to make the reflecting lens do deviation movement corresponding to bending shaft along axle x and twisting axle of axle y of the flexible beam; the bending deviation angle and twisting deviation angle are calculated by voltage VB and VT tested by two Histone bridges near top of the excited block and middle part of the flexible beam; each Histone bridge is composed of boron or phosphor doped piezoresistance.
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2008-4-17
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2008-3-31
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