Manufacturing method of silicon wire |
Title: |
Manufacturing method of silicon wire |
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Application Number: |
200610032947 |
Application Date: |
2006/01/14 |
Announcement Date: |
2007/07/18 |
Pub. Date: |
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Publication Number: |
101000867 |
Announcement Number: |
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Grant Date: |
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Granted Pub. Date: |
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ApplicationType: |
Invention |
State/Country: |
11[China|beijing] |
IPC: |
H01L 21/20, H01L 21/28, H01L 21/768 |
Applicant(s): |
Tsinghua Univ. |
Inventor(s): |
Yao Yuan, Xu Liguo, Fan Shoushan |
Key Words: |
silicon wire, manufacturing method |
Abstract: |
A method for preparing silicon wire includes providing a substrate, placing copper catalyst on said substrate, laying substrate with copper catalyst in high temperature reaction furnace and generating silicon wire by filling reaction gas and inert protection gas into said reaction furnace. |
Claim: |
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Priority: |
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PCT: |
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LegalStatus: |
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