''I'' structured three-dimensional micro solid/hollow silicon needle and silicon knife |
Title： |
| ''I'' structured three-dimensional micro solid/hollow silicon needle and silicon knife |
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Application Number： |
200610143214 |
Application Date： |
2006/10/31 |
Announcement Date： |
2007/07/11 |
Pub. Date： |
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Publication Number： |
1994486 |
Announcement Number： |
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Grant Date： |
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Granted Pub. Date： |
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ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
A61M 5/32, A61M 5/158, A61B 17/3209, A61B 10/00, H01L 21/027, H01L 21/306, G03F 7/00, C23F 1/32 |
Applicant(s)： |
Tsinghua University |
Inventor(s)： |
Yue Ruifeng, Wang Yan, Liu Litian |
Key Words： |
''I'' structured, silicon needle, silicon knife |
Abstract： |
The invention relates to a horizontal three-dimension micro solid/hollow silicon needle or blade used in surgery tools, wherein the needle/blade top prepared by micro-electric technique is horizontal parallel with first group III face of single-crystal silicon; the horizontal top is narrow straight line or curvature on one plane or convex face; one or two sides near the horizontal top or the middle part has triangle, trapezium, hexagon, or similar holes; the holes is through to the bottom of needle/blade via reverse-triangle groove formed by six faces to form through hole. The invention has low cost and high yield, while it can extract micro body liquid, etc. |
Claim： |
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Priority： |
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PCT： |
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LegalStatus： |
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