Cluster controller for etching devices |
Title： |
| Cluster controller for etching devices |
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Application Number： |
200610011922 |
Application Date： |
2006/05/17 |
Announcement Date： |
2007/05/09 |
Pub. Date： |
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Publication Number： |
1959569 |
Announcement Number： |
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Grant Date： |
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Granted Pub. Date： |
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ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
G05B 19/02 |
Applicant(s)： |
Beifang Tech Research Center of Microelectronics Base Equipment Co., Ltd. |
Inventor(s)： |
Xu Hua, Jia Peifa, Cao Yiming, Zhao Yannan, Wang Jiayin |
Key Words： |
etching devices, cluster controller |
Abstract： |
A cluster controller of etching machine consists of input unit for inputting data into controller, storage unit for storing data, output unit for displaying monitor state, CPU for executing control information, transmission unit being used to connect with etching machine and process module for outputting control information to etching machine according to condition required by process flow stored in said module. |
Claim： |
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Priority： |
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PCT： |
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