Abstract: |
It relates to an air bearing used for the super fine air flow movement system and coordinate measuring machine's movement parts. It features in the up cavity chamber, a lower cavity chamber and resistance formed air analog spring dual cavity structure designed in the middle of the air bearing to improve the resistance ability of the air bearing, to get over the long shock lessening period, unstable system, providing a highly stable air bearing, reducing outside vibrating force, shock and air bearing inherent micro vibration for the static and dynamic harm to overall movement system. |