Method for making two-frequency high temperature grating
Title：
Method for making two-frequency high temperature grating
Application Number：
 200610113298
Application Date：
 2006/09/22
Announcement Date：
 2007/03/07
Pub. Date：
Publication Number：
 1924622
Announcement Number：
Grant Date：
Granted Pub. Date：
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 G02B 5/18
Applicant(s)：
 Tsinghua University
Inventor(s)：
Key Words：
 making, two-frequency, high temperature, grating
Abstract：
 This invention relates to double frequency high temperature process method in the optical technique field, which is characterized by the following: focus ion beam microscopes fulfills the double frequency high temperature grating process of the mature commercial environment; through adjusting focus ion beam microscope amplifier times, beam intensity, etching depth, line distance and using system self accurate positioning system on the part surface or processing single grating and crossing grating and double frequency grating with variable intensity.
Claim：
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PCT：
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