Method and apparatus for measuring laser wave-length using heterodyne in interference method |
Title： |
| Method and apparatus for measuring laser wave-length using heterodyne in interference method |
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Application Number： |
200610083702 |
Application Date： |
2006/06/02 |
Announcement Date： |
2007/01/10 |
Pub. Date： |
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Publication Number： |
1892193 |
Announcement Number： |
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Grant Date： |
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Granted Pub. Date： |
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ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
G01J 9/02 |
Applicant(s)： |
Tsinghua Univ. |
Inventor(s)： |
Li Yan, Wang Xin, Zhang Shulian |
Key Words： |
measuring, laser wave-length, heterodyne in interference method |
Abstract： |
Method and device utilizing heterodyne interference method to take the measurements to optical maser wavelength belongs to laser measurement technology field. Said method contains making frequency shift to tested unifrequency laser generating dual frequency laser, to obtain heterodyne signal, adopting heterodyne interference system coupling dual frequency laser modulated standard wavelength laser and tested laser to same interference system, through interferometer arm length variation, comparing two laser heterodyne signal argument changing quantity to obtain tested optical wavelength value. The present invention raises wavelength measurement accuracy. |
Claim： |
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Priority： |
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PCT： |
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