Double-refraction external cavity displacement measuring system |
Title： |
| Double-refraction external cavity displacement measuring system |
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Application Number： |
200710064456 |
Application Date： |
2007/03/16 |
Announcement Date： |
2007/08/22 |
Pub. Date： |
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Publication Number： |
101021563 |
Announcement Number： |
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Grant Date： |
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Granted Pub. Date： |
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ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
G01S 17/02G01B 11/02 |
Applicant(s)： |
Tsinghua Univ. |
Inventor(s)： |
Zhang Shulian, Tan Yidong |
Key Words： |
Double-refraction, displacement measuring system, external cavity |
Abstract： |
The invention belongs to the laser measure technology field. The character is in that the birefringent exocoel returning displacement measure system is made up of the single-frequency microchip Nd:YAG laser of the LD pumping, the birefringent exocoel returning and the measuring circuit. When the measured object moves along the laser axis, the cosine signal with 90degreephase difference in the X and Y direction of the output end. The object moves to 1/2 wave length, the output light intensity of the laser will change one list. The light intensity of one period is divided into four polarized fields which is corresponded to 1/8 wave length displacement. So it can get the object displacement by detecting the polarized field number. If the moving direction changes, the sequence of the four polarized field in every period will change too to detect the displace direction. The device has the compact structure, high character/price ratio and small size. |
Claim： |
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Priority： |
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PCT： |
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LegalStatus： |
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