Method and apparatus for receiving high stable energy filtering electronic microscopic image |
Title： |
| Method and apparatus for receiving high stable energy filtering electronic microscopic image |
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Application Number： |
200610012165 |
Application Date： |
2006/06/09 |
Announcement Date： |
2006/11/15 |
Pub. Date： |
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Publication Number： |
1862761 |
Announcement Number： |
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Grant Date： |
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Granted Pub. Date： |
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ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
H01J 49/44, H01J 49/46, H01J 37/05 |
Applicant(s)： |
Tsinghua Univ. |
Inventor(s)： |
Wang Zhiwei, Yuan Jun, Xu Chen |
Key Words： |
Method and apparatus, receiving, high stable energy filtering electronic microscopic, image |
Abstract： |
This invention relates to high stable energy filtration digital microscopic imaging receives method and its equipment. It belongs to energy filtration digital microscopic imaging technique field. Drift detection feedback method is used to eliminate the drift of different energy digital space distribution to energy selecting crack caused by high voltage fluctuation or interference of electromagnetic wave. So the energy filtration receive device can keep the filtrated electron energy stable all the time during signal acquisition process. Then energy selecting crack width is adjusted to make energy segment that contain sample excitatory feature spectrum information. So the high space distinguishing and high energy distinguishing energy filtration image can be got after accumulation. |
Claim： |
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Priority： |
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PCT： |
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LegalStatus： |
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