Ring-vibration type digital acceleration sensor
Title：
Ring-vibration type digital acceleration sensor
Application Number：
 02146782
Application Date：
 2002/11/08
Announcement Date：
 2003/03/26
Pub. Date：
Publication Number：
 1405566
Announcement Number：
 1226630
Grant Date：
 2005-11-9
Granted Pub. Date：
 2005-11-9
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 G01P 15/097
Applicant(s)：
 Tsinghua Univ.
Inventor(s)：
 Liu Litian, Zhang Zhaohua, Yue Ruifeng
Key Words：
 Ring-vibration type, digital acceleration sensor
Abstract：
 A circle oscillation digital acceleration transducer is made by the connection in sequence of acceleration sensing elements formed by two circle oscillators with different frequencyes caused by stress mounted on the silicon beam or silicon film, frequency mixer and a filter. The said two circle oscillators are distributed in the stress sensitive zone of the silicon beam of film with one along the main stress, the other is vertical to it, or a circle oscillator is in the stress sensitive zone of the silicon beam/film while the other is distributed in the non-stress sensitive zone. Input of the frequency mixer is connected respectively with outputs of the above two circle oscillators, the frequency mixer and the filter are set on the non-stress sensitive thick silicon.
Claim：
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PCT：
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