Abstract: |
A carbon nanotube array structure is composed of a substrate, the alloy catalyst particles on the substrate, which contains the material to affect the growth speed of carbon nanotubes, and the array the carbon nanotubes which is grown from said alloy catalyst particles and bent toward a predefined direction. Its growing process includes such steps as generating a catalyst layer on the substrate, depositing at least two kinds of growth speed regulating material, annealing in oxygen contained gas to change the catalyst layer to catalyst particles, introducing carbon source gas, and growing carbon nanotubes. |