Nano composite film containing stibium and its preparation method
Title：
Nano composite film containing stibium and its preparation method
Application Number：
 02155411
Application Date：
 2002/12/12
Announcement Date：
 2003/05/07
Pub. Date：
Publication Number：
 1415778
Announcement Number：
 1195096
Grant Date：
 2005-3-30
Granted Pub. Date：
 2005-3-30
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 C23C 14/06, C23C 14/35
Applicant(s)：
 Tsinghua Univ
Inventor(s)：
 Ou Dingrong, Zhu Jing, Zhao Jiahao
Key Words：
 Nano composite film, containing stibium, preparation method
Abstract：
 A nano-class composite film containing Sb for intensifying light is prepared by magnetically controlled sputter with composite target and multi-layer method to deposite a film layer on the substrate. It features that the Sb nanoparticles are randomly dispersed in the insulating body by a certain volume percentage.
Claim：
Priority：
PCT：
LegalStatus：

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  Selected patents owned by Tsinghua University filed in 2005 are loaded.
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