Comb-shaped stereo silicon processing micro mechanical structure with fixed tooth offset
Title：
Comb-shaped stereo silicon processing micro mechanical structure with fixed tooth offset
Application Number：
 01141718
Application Date：
 2001/09/14
Announcement Date：
 2002/02/20
Pub. Date：
Publication Number：
 1336548
Announcement Number：
 1138148
Grant Date：
Granted Pub. Date：
 2004-2-11
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 B81B 5/00, G01P 15/08
Applicant(s)：
 Qinghua Univ.
Inventor(s)：
 Gao Zhongyu, Yuan Guang, Dong Jingxin
Key Words：
 Comb-shaped stereo, silicon processing, micro mechanical structure, fixed tooth offset
Abstract：
 The invention relates to design of miniature physical structure in processing spatial silicon. The invented structure consists of sensing unit, fixed teeth, and substrate. The sensing unit is composed of tooth-comb, multi group of motion teeth. The intervals from each tooth of comb in the sensing unit to adjacent two fixed teeth are not equal. The ratio of interval to two sides is 1:8-12. The invented structure provides important merits usch as less linkage blocks, large area, reducing the difficulty for block to key in, small contact resistance in place of key joint, uniformity, yield notably improved. It makes the design and process of miniature physical structure from two dimensions to three dimensions possible. Also, the invention increases resolution and precision greatly. Many lead wires and electrodes on glass plate electrode needed by the scheme of equally placed are reduced evidently. Thus one side, it prevents the interfere from distributed capacitance between lead wires and electric signal, on the other hand the amount of lead wires is decreased, work load for lead wires to key in is reduced.
Claim：
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PCT：
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