Method and apparatus for measuring laser wavelength by heterodyne interference method
Title:
Method and apparatus for measuring laser wavelength by heterodyne interference method
Application Number:
200610011807
Application Date:
2006/04/28
Announcement Date:
2006/10/11
Pub. Date:
Publication Number:
1844868
Announcement Number:
Grant Date:
Granted Pub. Date:
ApplicationType:
Invention
State/Country:
11[China|beijing]
IPC:
G01J 9/02
Applicant(s):
Tsinghua University
Inventor(s):
Li Yan, Wang Xin, Zhang Shulian
Key Words:
measuring, laser wavelength, heterodyne interference method
Abstract:
The invention discloses a method for using heterodyne interference method to measure the laser wavelength, and relative device. Wherein, shifting the frequency of single-frequency laser to generate two-frequency laser and attain the heterodyne signal using heterodyne interferometer to couple modulated two-frequency standard wavelength laser and the detected laser into one interference system via the change of heterodyne interferometer arm, to compare the phase change of heterodyne signal of said two lasers, to attain the wavelength of detected laser. Compared to present single-frequency interference measure that can only measure the integral grade of interference stripe, the invention can measure and compare the phase change of laser heterodyne signal, to improve the wavelength measure accuracy, and since it uses heterodyne method, the detecting signal is alternative, which can be amplified with high signal/noise ratio, therefore, the small signal can be extracted from high-noise background.
Claim:
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