Abstract: |
The vacuum gauge head includes a cathode, an anode, a shaded pole, an ion leadout pole, a repeller and a collector. One end of the shaded pole is corresponding to cathode unit, and the other end is corresponding to the ion leadout pole. There is an ion leadout hole in the center of the ion leadout pole. The repeller is in structure of curved surface, which encloses the side of the shaded pole near to the ion leadout pole. Being setup at base of structure of curved surface of the repeller, the collector is pointed to the said ion leadout hole. The anode is fixed inside middle of the shaded pole. Combining both advantages of gauge in saddle field and extractor guage, the vacuum gauge head possesses features of small size, low power consumption, simple structure and high sensitivity. |