Micro mechanical switch with strut beam made of sacrificial layer material |
Title: |
Micro mechanical switch with strut beam made of sacrificial layer material |
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Application Number: |
200410000698 |
Application Date: |
2004/01/16 |
Announcement Date: |
2004/12/29 |
Pub. Date: |
2007/05/23 |
Publication Number: |
1558437 |
Announcement Number: |
1317728 |
Grant Date: |
2007-5-23 |
Granted Pub. Date: |
2007-5-23 |
ApplicationType: |
Invention |
State/Country: |
11[China|beijing] |
IPC: |
H01H 59/00, H01H 49/00 |
Applicant(s): |
Tsinghua University |
Inventor(s): |
Liu Zewen, Lei Xiaofeng, Liu Litian |
Key Words: |
Micro mechanical switch, strut beam, sacrificial layer material |
Abstract: |
The invention discloses a micro mechanical switch by using sacrificial layer material as the strut beam belonging to the field of minisize electronic component, wherein the oxidation layer of the substrate is provided with a lower polar plate, a top polar plate and a strut beam, the strut beam is arranged between the upper and lower polar plates, and is made of sacrificial layer material. According to the invention, the metallic strut beam forming process needed by the conventional micro mechanical switch making procedure is saved, and the process flow is simplified. |
Claim: |
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Priority: |
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PCT: |
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LegalStatus: |
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