Process for preparing submicro-crystal piezoelectric ceramics
Process for preparing submicro-crystal piezoelectric ceramics
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C04B 35/462, C04B 35/472, C04B 35/475, C04B 35/622, H01L 41/187
Tsinghua University
Wang Xiaohui, Zhao Wei, Li Longtu, Gui Zhilun
Key Words:
submicro-crystal, piezoelectric, ceramics
The invention discloses a sub-micron crystal piezoelectricity ceramic material preparing method in the piezoelectric material technique domain, which is characterized by the following: using oxidate of bismuth, scandium and lead or inorganic salt and butyl titanate for raw material controlling pH value of liquor, temperature, density and charging sequence to take place of complexation with initiation raw material and citrate and form colloidal sols preparing nanometer powder body after gelatinization processing and pre-calcination process. The element of the ceramic material is perovskite-style ferroelectrics: (1-x) BiScO3-xPbTiO3, when x is equal to 0.64, the parameter d33 with piezo-electricity feature has the biggest value. The ceramic disc can reach the optimum property as follow: crystal size is 0.2-1.2 mum the max d33 is 560pC/N the electromechanical coupling factor Kp is 0.66 Curie temperature is 390-450deg.c.

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