Abstract： |
Stacked silicon-based micro fuel cell group and its production method belong to the field of micro-energy and micro-machining areas. It includes the single cell stacking, sealing component, claming component and fluid catheter. Two or more fuel cell single batteries form stack, which order is: the second outer plate (12), the second membrane electrode (22), the inner plate (13), the first membrane electrode (21) and the first outer plate (11), and use the clamping and sealing components to seal package. The production method includes processing silicon plate and seal packaging of different component parts, using silicon micro-machined to produce a drainage channel, packaging the single cell stack. The invention has small resistance of battery, small package size, flexible flow graphic design, various series and parallel forms, which can get a larger output current and voltage when a small increase in the volume of cases. |
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