Nano laser measuring rule and subdivision method for nano measurement realization |
Title： |
| Nano laser measuring rule and subdivision method for nano measurement realization |
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Application Number： |
200410088819 |
Application Date： |
2004/11/05 |
Announcement Date： |
2005/04/06 |
Pub. Date： |
2006/10/11 |
Publication Number： |
1603739 |
Announcement Number： |
1279327 |
Grant Date： |
2006-10-11 |
Granted Pub. Date： |
2006-10-11 |
ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
G01B 11/02, H01S 3/08, H01S 3/223 |
Applicant(s)： |
Tsinghua University |
Inventor(s)： |
Du Wenhua, Zhang Shulian, Li Yan |
Key Words： |
Nano, laser measuring rule, subdivision method, nano measurement |
Abstract： |
The invention provides a nanometer laser measurement rule and its realization close method and belongs to laser fine measurement technique field and is characterized by the following: it is based on the displacement sensor HeNe laser system using dopal as chamber lens and adds a fine micro displacement piezoelectricity sensor PZT which can alter the chamber length together with the subject to be measured. The output crossed polarized light goes through the polarized splitter lens and shoots on two photoelectric detectors and is under the large number and small number processes by the following circuit to get and output the measurement results. It eliminates the current errors in current technique and counts the power polarized curve cycles number so to achieve the high accuracy and resolution. |
Claim： |
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Priority： |
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PCT： |
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LegalStatus： |
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