Polarized zone control of silicon-base ferroelectric micro acoustic sensor and method of connecting electrode |
Title： |
| Polarized zone control of silicon-base ferroelectric micro acoustic sensor and method of connecting electrode |
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Application Number： |
200410009668 |
Application Date： |
2004/10/15 |
Announcement Date： |
2005/03/30 |
Pub. Date： |
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Publication Number： |
1602118 |
Announcement Number： |
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Grant Date： |
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Granted Pub. Date： |
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ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
H04R 31/00 |
Applicant(s)： |
Tsinghua Univ |
Inventor(s)： |
Ren Tianling, Yang Yi, Zhu Yiping |
Key Words： |
Polarized zone control, silicon-base ferroelectric, micro acoustic sensor, connecting electrode |
Abstract： |
The invention belongs to sensor area. Characters are as follows. Upper and lower electrode pair is divided into two classes, which are located in central area of diaphragm of micro acoustic sensor and in edge region of diaphragm. Electrodes are cascaded respectively in two areas. Then cascaded electrodes in two areas are connected in serial. Two pieces of not connected twp ends are as output ends of the sensor. In same area, domain poles of ferroelectric films cascaded electrodes adjacent and connected in electrically are in opposite directions. In different areas, domain poles of ferroelectric films cascaded electrodes adjacent and connected in electrically are in same directions. The disclosed connection and arrangement makes voltage sensibility of the sensor be raised in duplication. |
Claim： |
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Priority： |
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PCT： |
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LegalStatus： |
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