Abstract： |
A five freedom static electricity suspended variable capacity type micro - static electricity motor is used for MEMS systematical micro - execution unit and micro - inertia sensitive element etc field. It contains upper stator, lower stator, rotor, inner stator and outer stator, and suspend control system, wherein the upper and lower stator and inside and outside stator to form one closed intracavity, rotor suspend in annular intracavity geometrical center, utilizing axial direction radial boosting electrode to apply electrostatic force, through detecting capacitor differential variation between electrode and rotor to realize, through suspend control system to realize five freedom active static electricity suspension displacement detection, utilizing rotor salient pole and stator driving electrode to apply driving torque. Said invention provided micro - static electricity motor can restrict rotor all freedom of movement except rotating around the Z axis, not only eliminating mechanical contact induced moment of friction and raising working lives, but also providing larger driving moment and radial overload capacity, to obtain very high rotor speed. |
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