Micro mechanical switch for regulating resonance frequency using spiral coil inductive structure |
Title： |
| Micro mechanical switch for regulating resonance frequency using spiral coil inductive structure |
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Application Number： |
200410077951 |
Application Date： |
2004/09/21 |
Announcement Date： |
2005/03/02 |
Pub. Date： |
2007/06/20 |
Publication Number： |
1588604 |
Announcement Number： |
1322527 |
Grant Date： |
2007-6-20 |
Granted Pub. Date： |
2007-6-20 |
ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
H01H 59/00, H01P 1/10 |
Applicant(s)： |
Tsinghua Univ. |
Inventor(s)： |
Liu Zewen, Lei Xiaofeng, Liu Litian |
Key Words： |
Micro mechanical switch, regulate, resonance frequency, spiral coil, inductive structure |
Abstract： |
The invention discloses a micro mechanical switch for adjusting resonance with spiral coil conductance structure. There is oxidization layer, lower electrode board, silicon nitride layer covering the board, sacrifices layer connecting with the upper boards and the lower boards. Two ends of the upper board are connected to the upper electrode with spiral coil structure. Under the same condition of process flow, mechanical performance and traditional switch, through adjustment to the simple structure, it can realize controllable adjustment to the mechanical switch resonance frequency, decreases the resonance frequency of the switch greatly, and prolongs the lifespan of the switch. |
Claim： |
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Priority： |
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PCT： |
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LegalStatus： |
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