Micro mechanical switch of multiple resonance points |
Title： |
| Micro mechanical switch of multiple resonance points |
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Application Number： |
200410077950 |
Application Date： |
2004/09/21 |
Announcement Date： |
2005/03/02 |
Pub. Date： |
2007/04/25 |
Publication Number： |
1588603 |
Announcement Number： |
1312718 |
Grant Date： |
2007-4-25 |
Granted Pub. Date： |
2007-4-25 |
ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
H01H 59/00 |
Applicant(s)： |
Tsinghua Univ. |
Inventor(s)： |
Liu Zewen, Lei Xiaofeng, Liu Litian |
Key Words： |
Micro mechanical, switch, multiple resonance points |
Abstract： |
The invention discloses a micro mechanical switch with multiple resonance points belonging to semiconductor device field. There is oxidization layer, lower electrode board and silicon nitride layer, a sacrifices layer is arranged on the silicon nitride layer to support the upper electrode. There has at least one metal connection beam between the upper electrode and the ground wire, and at least one beam is grounded, the other is connected to the media layer of the ground wire or be suspended, and forms capacitance to ground; the connection uses straight beam, folding beam or folding spring structure to increase effective inductance. When in close state, the insulating grade expresses several resonance points, and improves the resonance character of micro-mechanical switch under the same structure feature. |
Claim： |
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Priority： |
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PCT： |
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LegalStatus： |
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