Micro flow sensor |
Title： |
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Application Number： |
200410068975 |
Application Date： |
2004/07/15 |
Announcement Date： |
2005/03/02 |
Pub. Date： |
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Publication Number： |
1587916 |
Announcement Number： |
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Grant Date： |
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Granted Pub. Date： |
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ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
G01F 1/05, G01F 1/56, G01F 15/00, G01P 5/00 |
Applicant(s)： |
Tsinghua Univ. |
Inventor(s)： |
Zhou Zhaoying, Peng Jiegang |
Key Words： |
Micro, flow sensor |
Abstract： |
A micro flow sensor belongs to measuring apparatus and instrument technical field, comprising two parts of sensing element which is a thin stick made of metal or semiconductor with rectangular section and detecting element which is installed on one end of the sensing element and covered by insulating coating with its electric signal brought out by outgoing line wire. The micro flow sensor has the following advantages: 1) simulating structure of simulate lateral line pilus structure of aquatic animal, its structure is simple and easily to be used in micro electromechanical system (MEMS) to do integrated manufacture. 2) only cold-contact to detected fluid whose biochemical stability will not be destroyed. |
Claim： |
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Priority： |
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PCT： |
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