Double micro mirror 2*2 array MEMS photo switch |
Title: |
Double micro mirror 2*2 array MEMS photo switch |
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Application Number: |
200410029733 |
Application Date: |
2004/03/25 |
Announcement Date: |
2005/02/16 |
Pub. Date: |
2006/10/11 |
Publication Number: |
1580841 |
Announcement Number: |
1279379 |
Grant Date: |
2006-10-11 |
Granted Pub. Date: |
2006-10-11 |
ApplicationType: |
Invention |
State/Country: |
11[China|beijing] |
IPC: |
G02B 6/32, G02B 6/35, H04B 10/12, H04J 14/02 |
Applicant(s): |
Tsinghua Univ. |
Inventor(s): |
Fang Huajun, Liu Litian, Ren Tianling |
Key Words: |
Double micro mirror, 2*2 array, MEMS, photo switch |
Abstract: |
The present invention discloses a double-micromirror 2X2 array type MEMS optical switch belonging to the field of micro-opto-electro-mechanical equipment. Said optical switch utilizes the anisotropic corrosion characteristics of 110 silicon substrate on the 110 silicon substrate, at th same time implements V-shaped groove for positioning optical fibre on the silicon substrate, vertical wall deep groove for reflecting light beam and perpendicular double-micromirror surface in the deep groove. On the silicon substrate surface a piezoelectric elastic composite film cantilever driving beam is made for driving said double-micromirror surface and simultaneously making it vertically up-down moved, moved into or moved out from optical circuit. The input and output optical fibres are respectively placed in four V-shaped grooves, and the direction of the V-shaped groove and micromirror surface and vertical deep groove wall are formed into an included angle of about 54.74 deg. |
Claim: |
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Priority: |
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PCT: |
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