Abstract： |
The invention discloses a tiny acoustics device, which is based on magnetoelectric effect. The invention belongs to semiconductor device field. The device is composed by movable diaphragm structure which has aggradation of hard magnetism film, and immovable structure which has aggradation of magnetic resistor several layers films. The movable diaphragm structure is composed from bottom to top by silicon underlay, silicon dioxide, silicon nitride layer, permanent magnetic material layer and silicon dioxide layer, the structure of immovable is same to the movable part, besides changing the permanent magnetic material layer to GMR magnetic resistor several layers film. The invention achieves diversion of electronic signal and acoustic signal between movable diaphragm film and magnetic resistor several layers films, so the tiny acoustics device which has high sensitivity, low yawp, wide range of response, and the following dealing circuit is very simple, because the technologic step is simple, the character of product is reliable, the rate of finished products is high, and is suitable to requirement of volume-produce. |
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