Mini piezoelectric drive for MEMS |
Title: |
Mini piezoelectric drive for MEMS |
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Application Number: |
200410008677 |
Application Date: |
2004/03/18 |
Announcement Date: |
2005/01/12 |
Pub. Date: |
2007/05/23 |
Publication Number: |
1564451 |
Announcement Number: |
1317815 |
Grant Date: |
2007-5-23 |
Granted Pub. Date: |
2007-5-23 |
ApplicationType: |
Invention |
State/Country: |
11[China|beijing] |
IPC: |
H02N 2/02 |
Applicant(s): |
Tsinghua Univ. |
Inventor(s): |
Fang Huajun, Liu Litian, Ren Tianling |
Key Words: |
Mini, piezoelectric drive, MEMS |
Abstract: |
Symmetrical parallel cascaded drives in suspension girder structure is formed relative to symmetry axis X though connection of tail trimmers on two ends or middle of suspension elastic beam. Middle parts of suspension girder on two sides of drive through connection of tail trimmer are connected to substrate so as to form fixed end. Number of parallel cascaded suspension girders can be equal or larger than 3. Composite piezoelectric unit in multilayer film in each suspension elastic beam is distributed symmetrical to Y-axis. Thus, piezoelectric drive having large vertical displacement is configured in multistage of going forward one by one. Features are large driving force, lowered driving voltage, and reduced length, as well as high reliability and simple technique. |
Claim: |
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Priority: |
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PCT: |
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