Piezoelectric driving element having multilayer piezoelectric composite membrane structure |
Title： |
| Piezoelectric driving element having multilayer piezoelectric composite membrane structure |
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Application Number： |
200410030781 |
Application Date： |
2004/04/09 |
Announcement Date： |
2005/01/12 |
Pub. Date： |
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Publication Number： |
1564334 |
Announcement Number： |
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Grant Date： |
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Granted Pub. Date： |
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ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
H01L 41/083, H01L 41/09 |
Applicant(s)： |
Tsinghua |
Inventor(s)： |
Zhang Ningxin, Yang Yi, Ren Tianling |
Key Words： |
Piezoelectric, driving element, multilayer piezoelectric, composite membrane structure |
Abstract： |
Disclosed piezoelectric driving device belonging to MEMS device is applicable to micro displacement device, read/write head in driving arm of hard disk. Following layers are prepared on silicon substrate from bottom up by using general MEMS method: silicon substrate, thermooxidizing silicon dioxide layer, adhesion layer of metallic titanium, metal platinum layer with bottom electrode, composite layer between 1-N layer piezoelectric thin film PZT layer and metal platinum layer with inner electrode, silicon oxide layer and aluminum lead layer. Triplex layer parallel connection structure is adopted in the invention. Comparing with original structure in cantilever beam type, displacement at end part is raised three times in the invention under identical driving voltage and identical structured thickness. Or, driving voltage can be lowered to 1/3 of original voltage under identical displacement at end part. |
Claim： |
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Priority： |
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PCT： |
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LegalStatus： |
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