Micro-ultrasonic device making technics facing orientation and distance-measuring application |
Title: |
Micro-ultrasonic device making technics facing orientation and distance-measuring application |
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Application Number: |
200510093797 |
Application Date: |
2005/08/31 |
Announcement Date: |
2006/02/08 |
Pub. Date: |
2007/12/19 |
Publication Number: |
1731595 |
Announcement Number: |
100356604 |
Grant Date: |
2007-12-19 |
Granted Pub. Date: |
2007-12-19 |
ApplicationType: |
Invention |
State/Country: |
11[China|beijing] |
IPC: |
H01L 41/22, G01S 7/521 |
Applicant(s): |
Tsinghua University |
Inventor(s): |
Ren Tianling, Zhu Yiping, Yang Yi, Liu Litian |
Key Words: |
Micro-ultrasonic device, making technics, orientation, distance-measuring |
Abstract: |
The invention discloses a manufacturing technique for producing micro hyperacoustic components for poisoning and ranging. The inventive technique combines MEMS process technology and has the advantages of high reliability. Piezoelectric micro hyperacoustic components manufactured with the said technique possess interchange effect of ultrasonic and electric signals, and can be used as ultrasonic receiver and transmitter for positioning and ranging system. |
Claim: |
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Priority: |
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PCT: |
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LegalStatus: |
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