Thermal interface material producing method |
Title: |
Thermal interface material producing method |
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Application Number: |
200510034239 |
Application Date: |
2005/04/14 |
Announcement Date: |
2006/10/18 |
Pub. Date: |
2007/12/26 |
Publication Number: |
1848414 |
Announcement Number: |
100358132 |
Grant Date: |
2007-12-26 |
Granted Pub. Date: |
2007-12-26 |
ApplicationType: |
Invention |
State/Country: |
11[China|beijing] |
IPC: |
H01L 23/34, H01L 23/373, H01L 23/367, C09K 5/02, C23C 16/00 |
Applicant(s): |
Tsinghua Univ. |
Inventor(s): |
Huang Hua, Wu Yang, Liu Changhong, Fan Shoushan |
Key Words: |
Thermal interface material, producing method |
Abstract: |
The present invention provides a preparation method of thermal interface material. Said method includes the following steps: providing a carbon nano tube array, using phase change material to fill the gap of the described carbon nano tube array so as to form composite phase change material; along the direction crossed with the described carbon nano tube array cutting the described phase change material into slab with predefined thickness; heating the described composite phase change material slab to the temperature above the phase change temperature of said phase change material, making two ends of the described carbon nano tube array be exposed from said phase change material, then cooling the described composite phase change material slab so as to form thermal interface material. |
Claim: |
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Priority: |
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PCT: |
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