Growth appts. of carson nanotube array and growth method of multi-wall carbon nanotube array |
Title: |
Growth appts. of carson nanotube array and growth method of multi-wall carbon nanotube array |
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Application Number: |
200510033733 |
Application Date: |
2005/03/18 |
Announcement Date: |
2006/09/20 |
Pub. Date: |
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Publication Number: |
1834006 |
Announcement Number: |
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Grant Date: |
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Granted Pub. Date: |
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ApplicationType: |
Invention |
State/Country: |
11[China|beijing] |
IPC: |
C01B 31/02, D01F 9/127, C23C 16/26, C30B 25/00 |
Applicant(s): |
Tsinghua Univ. |
Inventor(s): |
Jiang Kaili, Liu Kai, Fan Shoushan |
Key Words: |
Growth appts., carson nanotube array, growth method, multi-wall carbon nanotube array |
Abstract: |
This invention discloses an instrument for carbon nanotube growth, which comprises a reaction furnace having a gas inlet and a gas outlet. A quartz boat is placed in the furnace. A substrate for carbon nanotube growth is placed in the quartz boat and a first catalyst layer is deposited onto one surface of the substrate. There is also a second catalyst powder in the quartz boat. It is placed near and in front of the substrate along the gas flow direction. This invention also discloses a method for multiple-wall carbon nanotube (MWNT) growth, which comprises following steps: A substrate is provided, of which a first catalyst layer is deposited onto one surface. The substrate is placed in a quartz boat, in which a second catalyst powder is also placed near and in front of the substrate along the gas flow direction. The quartz boat is placed in a reaction furnace. The furnace is heated to preset temperature and carbon-source gas is let in for the growth of MWNT array on the substrate surface. |
Claim: |
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Priority: |
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PCT: |
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