Nanometer structure micro mechanical biochemical sensor |
Title: |
Nanometer structure micro mechanical biochemical sensor |
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Application Number: |
200510130477 |
Application Date: |
2005/12/13 |
Announcement Date: |
2006/06/28 |
Pub. Date: |
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Publication Number: |
1793916 |
Announcement Number: |
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Grant Date: |
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Granted Pub. Date: |
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ApplicationType: |
Invention |
State/Country: |
11[China|beijing] |
IPC: |
G01N 33/22, G01N 25/54, G01N 35/00, G01N 5/02 |
Applicant(s): |
Tsinghua Univ. |
Inventor(s): |
Wang Zheyao, Zhou Youzheng, Zhuang Zhiwei, Liu Litian |
Key Words: |
Nanometer structure, micro mechanical, biochemical sensor |
Abstract: |
A micromechanical biochemical transducer of nanostructure is prepared as setting micro suspension ¨C arm on SOI silicon base, coating silica insulation layer on said arm with its top layer being heating resistance prepared by single ¨C crystal silicon, coating nanomaterial on heating resistance, connecting nanomaterial heating unit to heating resistance by leading wire, setting laser generator and transducer output signal detection unit of position sensitive detector above micro suspension ¨C arm. |
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