Ultrathin triple-freedom inching work table |
Title： |
| Ultrathin triple-freedom inching work table |
|
Application Number： |
200710111591 |
Application Date： |
2007/06/22 |
Announcement Date： |
2007/11/21 |
Pub. Date： |
|
Publication Number： |
101075098 |
Announcement Number： |
|
Grant Date： |
|
Granted Pub. Date： |
|
ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
G03F 7/20B25H 1/00 |
Applicant(s)： |
Tsinghua Univ. |
Inventor(s)： |
Zhu Yu, Zhang Ming, Li Guang, Yin Wensheng, Xu Dengfeng |
Key Words： |
Ultrathin, triple-freedom, inching, work table |
Abstract： |
A super-thin operation table of 3-freedow micro-motion type consists of base of micro-motion table, rotator of micro-motion table and stator of micro-motion table. It is featured as forming said stator of micro-motion table by inserting 3-sets of driving unit coils into one coil framework, forming said rotator of micro-motion table by top slide cover and bottom slide cover, firm-jointing two said covers and suspending two said covers on base of micro-motion table through air-floating or magnetic-floating bearing. |
Claim： |
|
Priority： |
|
PCT： |
|
LegalStatus： |
|
Relevancy information
