Sensor for self-testing self-oscillation of resonant-type tiny cantilever beam |
Title： |
| Sensor for self-testing self-oscillation of resonant-type tiny cantilever beam |
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Application Number： |
200710119269 |
Application Date： |
2007/07/19 |
Announcement Date： |
2007/12/26 |
Pub. Date： |
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Publication Number： |
101093204 |
Announcement Number： |
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Grant Date： |
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Granted Pub. Date： |
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ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
G01N 27/00G01N 23/00B81B 7/02 |
Applicant(s)： |
Tsinghua Univ. |
Inventor(s)： |
You Zheng, Zhao Jiahao, Zhou Qin, Li Ke, Dong Ying, Yu Shijie, Bi Yangang |
Key Words： |
Sensor, self-testing, self-oscillation, resonant-type, cantilever beam |
Abstract： |
A self-detection transducer of self-excitation oscillation on resonant micro-cantilever beam is prepared for forming closed loop circuit by series-connecting frequency-selection network, filter amplification circuit, phase compensation circuit with driving circuit; forming frequency-selection network by micro-cantilever beam, compensation circuit, operation- amplification circuit, the first and the second feedback circuits; connecting bottom electrode to negative input end of operation amplification circuit and top electrode to positive input end of operation amplification circuit through compensation circuit. |
Claim： |
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Priority： |
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PCT： |
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