Travelling wave driven prezoelectric ceramic pump capable of realizing forward-reverse fluid flow
Travelling wave driven prezoelectric ceramic pump capable of realizing forward-reverse fluid flow
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F04B 17/00
Tsinghua Univ.
Chu Xiangcheng, Li Longtu, Yuan Songmei
Key Words:
forward-reverse, fluid flow, travelling wave driven, prezoelectric ceramic pump
The invention relates to flow pump technique field in precise machine which features that the circle edge of pump body is processed with slots on both upper and lower side, and with several through holes in slots; the slot is sealed by upper and lower pump cover forming a flow channel; upper and lower piezoelectric ceramic plate pasted respectively on the upper and lower side of the pump body, moreover the upper and lower pieces is one fourth wavelength different along the circle, generating a needed traveling wave fluctuate in upper and lower slots while working; flow inlet port and outlet port placed on the same or different sides of the ceramic pump, and block is just between the two port ensuring the flow enters from the inlet port and leaves from the outlet port. The flow direction is controlled by the phase difference of the two exterior power source while the flow amount, speed and back pressure with width, frequency and phase position. It is of low sealing requirement, high reliability, fine flow block performance, handily operation and the working frequency is above 10 KHz.

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