High-frequency sound surface wave device emtal alloy film with electromigration-resistance |
Title： |
| High-frequency sound surface wave device emtal alloy film with electromigration-resistance |
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Application Number： |
200510076884 |
Application Date： |
2005/06/20 |
Announcement Date： |
2005/10/26 |
Pub. Date： |
2007/03/14 |
Publication Number： |
1688103 |
Announcement Number： |
1305215 |
Grant Date： |
2007-3-14 |
Granted Pub. Date： |
2007-3-14 |
ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
H03H 3/08 |
Applicant(s)： |
Tsinghua Univ. |
Inventor(s)： |
Li Dongmei, Pan Feng, Wang Xubo, Zeng Fei |
Key Words： |
electromigration-resistance, high-frequency sound, surface wave device, emtal alloy film |
Abstract： |
This invention discloses a high frequency sound surface wave device metallic alloy film with dielectric migration, which is Al-Co-Mo alloy film with Mo 0.1-2wt%, Co 0.1-2wt% and Al for the rest deposited on a piezoelectric matrix by the way of physical gas-phase deposition, used in high power and high frequency sound surface wave device to increase the adhesive force and power bearing free of films in the high frequency sound surface wave devices. |
Claim： |
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Priority： |
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PCT： |
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LegalStatus： |
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