Microdiaphragm accelerating sensor with nanometer materials |
Title: |
Microdiaphragm accelerating sensor with nanometer materials |
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Application Number: |
200510007630 |
Application Date: |
2005/02/07 |
Announcement Date: |
2006/08/16 |
Pub. Date: |
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Publication Number: |
1818664 |
Announcement Number: |
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Grant Date: |
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Granted Pub. Date: |
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ApplicationType: |
Invention |
State/Country: |
11[China|beijing] |
IPC: |
G01P 15/12, G01D 5/16, H01L 49/00 |
Applicant(s): |
Tsinghua Univ. |
Inventor(s): |
Yang Xing, Zhou Zhaoying, Xiao Mingfei |
Key Words: |
nanometer materials, microdiaphragm, accelerating sensor |
Abstract: |
An acceleration transducer of microdiaphragm type based on nanomaterial consists of silicon diaphragm; top and bottom corers ;one dimensional or two dimensional manomaterial; gold electrode and leading wire distributed on diaphragm; wire being led out by pressure welding process; and signal processing circuit formed by rectifying and voltage stabilized circuit, wave carrier oscillator, measuring bridge and AC wave carrier amplifier .It is featured setting diaphragm between top and bottom covers and bonding them together as well as connecting one or two dimensional nanomaterial to be measuring bridge . |
Claim: |
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Priority: |
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PCT: |
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