Micro machinery variable capacitor for realizing high capacity valve regulating range using curved polar plate |
Title： |
| Micro machinery variable capacitor for realizing high capacity valve regulating range using curved polar plate |
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Application Number： |
200510002224 |
Application Date： |
2005/01/18 |
Announcement Date： |
2005/08/03 |
Pub. Date： |
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Publication Number： |
1649166 |
Announcement Number： |
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Grant Date： |
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Granted Pub. Date： |
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ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
H01L 29/00, H01L 27/00, H01G 5/00, B81B 7/00 |
Applicant(s)： |
Tsinghua Univ. |
Inventor(s)： |
Liu Zewen, Lei Xiaofeng, Fang Jie |
Key Words： |
curved polar plate, high capacity valve, micro machinery, variable, capacitor |
Abstract： |
This invention discloses a micro-mechanical variable capacitor realizing high capacitance value regulation sphere applying bent pole plates. A heat oxidation layer is covered on a high silicon substrate, a lower pole plate metal layer of 0.15-3.0 mum thick is set on it, an insulation layer is on the middle and a sacrificial layer supports the upper pole plate on the metal layers of both sides of the lower plate to make the distance between the upper pole plate and the lower electrode 1-4mum. Said upper pole plate is bent with the thickness of 0.3-3.0mum connected with the supporting beam of the sacrificial layer by a thin beam with low factor. |
Claim： |
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Priority： |
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PCT： |
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LegalStatus： |
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