Laser feedback nano displaycement measuring device |
Title： |
| Laser feedback nano displaycement measuring device |
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Application Number： |
200510011258 |
Application Date： |
2005/01/26 |
Announcement Date： |
2005/08/03 |
Pub. Date： |
2007/08/22 |
Publication Number： |
1648682 |
Announcement Number： |
1333230 |
Grant Date： |
2007-8-22 |
Granted Pub. Date： |
2007-8-22 |
ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
G01B 11/00, G01S 17/06 |
Applicant(s)： |
Tsinghua Univ. |
Inventor(s)： |
Zhang Shulian, Fei Ligang |
Key Words： |
Laser feedback, nano, displaycement, measuring device |
Abstract： |
The present invention belongs to the field of laser measurement technology, and features that 632.8 nm He-Ne laser and outer high reflectivity reflector constitute one non-collimated multiple laser feedback system. The outer reflector is fixed onto the tested object, and when the tested object is shifted, the laser strength fluctuation frequency may reach several to decades times that of the traditional feedback mode to result in high order frequency multiplying effect in laser strength fluctuation. The laser strength fluctuation period corresponds to nanometer level change in the distance between the outer reflector and the laser, so that measuring the period number of the laser strength variation can obtain the displacement of the measured object. When the object changes its moving direction, the laser polarization state jumps between two orthogonal directions and this may be used in judging the moving direction of the object. |
Claim： |
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Priority： |
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PCT： |
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LegalStatus： |
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