Laser confocal feedback micro measuring device |
Title： |
| Laser confocal feedback micro measuring device |
|
Application Number： |
200610114088 |
Application Date： |
2006/10/27 |
Announcement Date： |
2007/04/11 |
Pub. Date： |
|
Publication Number： |
1945202 |
Announcement Number： |
|
Grant Date： |
|
Granted Pub. Date： |
|
ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
G01B 11/00, G01B 11/24 |
Applicant(s)： |
Tsinghua Univ. |
Inventor(s)： |
Zhang Shulian, Wan Xinjun |
Key Words： |
Laser, confocal, feedback, micro measuring device |
Abstract： |
The present invention relates to topographic measurement, and is especially micro topographic measurement technology for discrete surface of low reflectivity sample. The measuring device includes single longitudinal mode microchip laser, lens and spectroscope in the laser emitting path, lens and laser detector in the reflecting path, frequency shifter and confocal feedback module in the transmitted light path, sinusoidal signal emitting source, signal modulating circuit, orthogonal phase-sensitive detector and reference signal generator circuit. The present invention may be used in the topographic measurement of both continuous surface and discrete surface. |
Claim： |
|
Priority： |
|
PCT： |
|
LegalStatus： |
|
Relevancy information
