Aluminum nitride/borosilicate glass low-temperature co-fired ceramic substrate material and preparation method thereof
Title：
Aluminum nitride/borosilicate glass low-temperature co-fired ceramic substrate material and preparation method thereof
Application Number：
 200710118465
Application Date：
 2007/07/06
Announcement Date：
 2008/01/09
Pub. Date：
Publication Number：
 101100367
Announcement Number：
Grant Date：
Granted Pub. Date：
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 C04B 35/00C04B 35/582H05K 1/03
Applicant(s)：
 Tsinghua University
Inventor(s)：
 Zhao Hongsheng, Gao Nianzi
Key Words：
 ceramic substrate material, co-fired, low-temperature, Aluminum nitride, borosilicate
Abstract：
 This invention relates to electronic baseplate by low-temperature co-sintering of aluminium nitride/borosilicate glass. This baseplate is composed of: AlN 30-70%; oxides 30-70%. Said oxides are then composed (by mol percentages) of: SiO2 8-12%, B203 18-24%, ZnO 45-60%, Al203 3-8%, Li20 3-8%. This inventive product has excellent comprehensive properties, its heat conductivity is increased from that of prior art product 2-5 W/m.K to 10W/m.K. It can be used in more greater power devices with excellent dielectric property. This invention has also advantages of: easily available raw materials, low cost, simple process.
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