Field emission type electron source and its manufacturing method |
Title: |
Field emission type electron source and its manufacturing method |
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Application Number: |
200610060018 |
Application Date: |
2006/03/22 |
Announcement Date: |
2007/09/26 |
Pub. Date: |
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Publication Number: |
101042977 |
Announcement Number: |
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Grant Date: |
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Granted Pub. Date: |
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ApplicationType: |
Invention |
State/Country: |
11[China|beijing] |
IPC: |
H01J 37/06, H01J 1/30, H01J 9/02 |
Applicant(s): |
Tsinghua University |
Inventor(s): |
Wei Yang, Liu Liang, Wei Wei, Jiang Kaili, Fan Shoushan |
Key Words: |
Field emission, electron source, manufacturing method |
Abstract: |
The invention relates to a carbon nano pipe field emission electron source that comprises: a conductive base, a carbon nano pipe and a conductive metal layer, the conductive base possesses a top, one end of the carbon nano pipe is electric connected with the top of the conductive base, the other end extends along the top of the conductive base, the conductive metal layer is formed on the surface of the carbon nano pipe and the conductive base. The invention also relates to manufacturing method of said carbon nano pipe field emission electron source. |
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Priority: |
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