Force sensor based on Micro-Nano composite structure |
Title： |
| Force sensor based on Micro-Nano composite structure |
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Application Number： |
200410101600 |
Application Date： |
2004/12/24 |
Announcement Date： |
2006/07/05 |
Pub. Date： |
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Publication Number： |
1796952 |
Announcement Number： |
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Grant Date： |
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Granted Pub. Date： |
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ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
G01L 1/00, G01L 1/10, G01L 1/16, G01L 1/18, B81B 3/00, B82B 1/00 |
Applicant(s)： |
Tsinghua Univ. |
Inventor(s)： |
Zhou Zhaoying, Zhu Rong, Wang Dingqu, Ye Xiongying |
Key Words： |
Force sensor, Micro-Nano composite structure |
Abstract： |
The invention discloses a force sensor based on micro-nano combined structure, comprising bridge beam, mass block, substrate and plural electrodes arranged on the substrate, where there is an insulating layer between the electrodes and the substrate, the two ends of the bridge beam are fixed on the electrodes, the mass block is fixed in the middle of the bridge beam, suspending in midair, and the bridge beam is a semiconductor oxide nano tape and the force sensor also comprises a resonance frequency detection circuit for measuring the resonance frequency of the bridge beam. The force sensor is combined of micro-electromechanical (MEM) sensor and nano material, adopts the semiconductor oxide nano tape as the bridge beam and the structure of the force sensor is controllable and no-defect and besides, the nano tape has excellent flexibility and can make larger deformation under the force action, and these advantages can improve the resolution and accuracy of the force sensor. It makes more measuring methods able to be selected for the force sensor. |
Claim： |
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Priority： |
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PCT： |
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