Angular Rate sensor of microslot channel flow
Title：
Angular Rate sensor of microslot channel flow
Application Number：
 200410091707
Application Date：
 2004/11/25
Announcement Date：
 2006/05/31
Pub. Date：
Publication Number：
 1779465
Announcement Number：
Grant Date：
Granted Pub. Date：
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 G01P 9/00, G01C 19/58
Applicant(s)：
 Tsinghua Univ.
Inventor(s)：
 Ding Henggao, Zhu Rong
Key Words：
 Angular Rate sensor, microslot channel flow
Abstract：
 An angular rate transducer of micro channel fluid consists of sealed cavity including top part with driving film and bottom part with a numbers of through channels. It features that driving element is set on said driving film, a pair of thermo sensitive elements and its connected detection circuit are set symmetrically on outlet of each channel and output of detection circuit is angular rate.
Claim：
Priority：
PCT：
LegalStatus：

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  Selected patents owned by Tsinghua University filed in 2005 are loaded.
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