Ultra magnetostrictive high precision linear driver using piezozelectric effect clamping
Title：
Ultra magnetostrictive high precision linear driver using piezozelectric effect clamping
Application Number：
 200410090867
Application Date：
 2004/11/16
Announcement Date：
 2005/05/25
Pub. Date：
Publication Number：
 1619938
Announcement Number：
Grant Date：
Granted Pub. Date：
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 H02N 2/04
Applicant(s)：
 Tsinghua Univ.
Inventor(s)：
 Meng Yonggang, Li Cuihong, Ye Zishen
Key Words：
 Ultra magnetostrictive, high precision, linear driver, piezozelectric effect clamping
Abstract：
 This invention discloses a ultra-magnetostriction high precision straight line driver with mm grade stroke and nano grade position precision utilizing piezoelectric effect clamping, belonging to micro electromechanical equipment technology field. Said driver contains main unit with V-shape groove rail fixed on inner side, base, flexible hinge frame, piezoelectric device, clamping unit, ultra-magnetostriction device and high precision displacement sensor. Said invention has greater than 5mm effective stroke and 30 nm position precision.
Claim：
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PCT：
LegalStatus：

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2008-4-17
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