Piezoelectric driven array micro spray and its processing method |
Title： |
| Piezoelectric driven array micro spray and its processing method |
|
Application Number： |
200410074073 |
Application Date： |
2004/09/03 |
Announcement Date： |
2005/03/02 |
Pub. Date： |
|
Publication Number： |
1586653 |
Announcement Number： |
|
Grant Date： |
|
Granted Pub. Date： |
|
ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
A61M 11/00, A61M 15/00, B81B 7/00, B81C 5/00 |
Applicant(s)： |
Tsinghua Univ. |
Inventor(s)： |
Zhou Zhaoying, Zhu Junhua, Du Guibin |
Key Words： |
Piezoelectric driven, array, micro spray, processing method |
Abstract： |
The present invention belongs to the field of medical equipment technology, and aims at facilitating the manufacture of piezoelectric driven micro sprayer array and lowering its cost. The piezoelectric driven micro sprayer array includes spray hole film in honeycomb notch structure, elastic cavity film and piezoelectric sheet. The array notch structure of straight walled hexagons has raised strength and increased flow rate. The present invention also discloses the manufacture process of the piezoelectric driven micro sprayer array, and the manufacture process features the simple and cheap UV-LIGA technique suitable for industrial production. |
Claim： |
|
Priority： |
|
PCT： |
|
LegalStatus： |
|
Relevancy information
