Microworking method of miniature electric heating element having micron-level thermoelectric arm
Title：
Microworking method of miniature electric heating element having micron-level thermoelectric arm
Application Number：
 200410038297
Application Date：
 2004/05/21
Announcement Date：
 2005/02/16
Pub. Date：
Publication Number：
 1581529
Announcement Number：
Grant Date：
Granted Pub. Date：
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 H01L 35/00, H01L 35/34
Applicant(s)：
 Tsinghua Univ.
Inventor(s)：
 Li Jingfeng
Key Words：
 Microworking method, miniature electric heating element, micron-level, thermoelectric arm
Abstract：
 Combining depth ionic reaction etching technique for silicon wafer with powder padding technique for minitype mould and minitype die casting technique of air pressure fusion, disclosed method prepares array structure of thermoelectrical arm of P type and N type material in stagger arrangement on same silicon chip at one time. After silicon film being removed by using dry process gas corrosion technique of semiconductor, thermoelectric elements are assembled together with upper and lower base plates arranged. Packing density can reach 10000 pair of P-N junction/cm2. The invention is applicable to mini type thermoelectricity batteries and thermoelectricity freezer based on thermoelectric effect.
Claim：
Priority：
PCT：
LegalStatus：

Recommend this patent:
1 2 3 4 5
Average ( 0 votes):
                                                                          Recommended Patents>>

Relevancy information



Other Patents of Same Inventor

Lead free piezoelectric ceramics of potassium sodium niobate and preparation thereof
Sodium bismuth phthalate-barium zirconium phthalate leadless piezoelectric ceramic and its preparation method
Ag-Pb-Sb-Te thermoelectric materials and preparation process thereof
Method of increasing property of bismuth sodium titanate base lead-free piezoelectric ceramic
1-3 structure huge magnetoelectric material and preparing process thereof
Nanometer SiC/ Bi2Te3 base thermoelectric material preparation method
Method for preparing piezoelectric ceramic film
Micro processing process for silicon nitride ceramic parts
Nano SiC granule composite CoSb3 base thermoelectric material and its preparing process
A porous piezoelectric ceramic and its manufacture method
Method for preparing composite material in symmetrical gradient between metallic material and ceramic material



News & Events More>>

Last Update  
2008-4-17
  Selected patents owned by Tsinghua University filed in 2005 are loaded.
2008-3-31
  Selected patents owned by Tsinghua University filed in 2006 and 2007 are load.







Copyright 2008-2015 All Rights Reserved Patent License of China.      Designed by Easygo