Multilayer film piezoelectric element of micro-actuator for hard disk and method for making same
Title：
Multilayer film piezoelectric element of micro-actuator for hard disk and method for making same
Application Number：
 200410009092
Application Date：
 2004/05/14
Announcement Date：
 2005/01/26
Pub. Date：
Publication Number：
 1571181
Announcement Number：
Grant Date：
Granted Pub. Date：
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 G11B 19/20, H01L 41/047, H01L 41/083, H01L 41/187, H01L 41/24
Applicant(s)：
 Tsinghua University
Inventor(s)：
 Jing Yang, Luo Jianbin, Lu Xinchun
Key Words：
 Multilayer film, piezoelectric element, micro-actuator, hard disk, making method
Abstract：
 The invention relates to a multifilm piezoelectric element in harddisk micro-actuator and its preparing method. It makes piezoelectric ceramic film by casting method or web printing technique, etc., and makes medium electrode layer by web printing technique, etc. It adopts Ag/Pd electrode and PMN-PZT material to realize low- temperature coburn (reducing from >1300 deg.C to 1030-1190 deg.C). The invention increases the free-end displacement of magnetic head cantilever installed with piezoelectric micro-actuator to >=0.80 mum and resonance frequency to >15KHz (at the condition of external voltage <=40V) to make the micro-actuator have the characters of excellent displacement/voltage sensitivity, resonance frequency, driving force, etc., thus applied to accurate addressing and path location of secondary micro- actuator of a computer harddisk double-stage servo system. It can be widely applied to other technical fields of micro-actuation and position control.
Claim：
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PCT：
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2008-4-17
  Selected patents owned by Tsinghua University filed in 2005 are loaded.
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