Multilayer film piezoelectric element for fine positioning micro-actuator and method for making same
Title：
Multilayer film piezoelectric element for fine positioning micro-actuator and method for making same
Application Number：
 200410009090
Application Date：
 2004/05/14
Announcement Date：
 2005/01/26
Pub. Date：
Publication Number：
 1571180
Announcement Number：
Grant Date：
Granted Pub. Date：
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 B81B 7/02, B81C 5/00, G11B 19/00, H01L 41/083, H01L 41/22
Applicant(s)：
 Tsinghua University
Inventor(s)：
 Jing Yang, Luo Jianbin, Lu Xinchun
Key Words：
 Multilayer film, piezoelectric element, fine positioning, micro-actuator, making method
Abstract：
 The invention relates to a multifilm piezoelectric element used in accurate-positioning micro-actuator and its preparing method. It selects high-d31 property piezoelectric material, makes multifilm element by sol-gel method and photoetching technique, and simultaneously adopts spattering technique, etc., to make medium electrode layer and outer electrode layer. It is used in accurately positioning computer magnetic head, increases free-end displacement of magnetic head cantilever to >=0.80 mum, and resonance frequency to >15KHz to make the micro-actuator have the characters of excellent displacement/voltage sensitivity, resonance frequency, driving force, etc. The made micro actuator has element capacitance <=5nF and element resistance >=10 ohm, shock resistance of the micro-actuator >1000g, and high-low temperature resistance is 1000Hr (-40deg.C-125deg.C). It has the advantages: structure novel, performance excellent, manufacture convenient, application wide, etc., and provides the reliable technical basis for implementing magnetic head control at positioning accuracy 0.025 mum.
Claim：
Priority：
PCT：
LegalStatus：

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2008-4-17
  Selected patents owned by Tsinghua University filed in 2005 are loaded.
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  Selected patents owned by Tsinghua University filed in 2006 and 2007 are load.







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