Adjustable frequency difference two-frequency laser back-feed nano measuring ruler for frequency stabilizing |
Title： |
| Adjustable frequency difference two-frequency laser back-feed nano measuring ruler for frequency stabilizing |
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Application Number： |
200710176051 |
Application Date： |
2007/10/18 |
Announcement Date： |
2008/03/05 |
Pub. Date： |
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Publication Number： |
101135551 |
Announcement Number： |
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Grant Date： |
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Granted Pub. Date： |
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ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
G01B 11/00, G01B 9/02, G01D 5/26 |
Applicant(s)： |
Tsinghua University |
Inventor(s)： |
Zhang Shulian, Cui Liu |
Key Words： |
Adjustable frequency difference, two-frequency laser, back-feed, nano measuring ruler |
Abstract： |
The nanometer measuring tape comprises a light source, a probe and a target mirror. The light source uses a frequency-stabilized dual-frequency helium-neon laser; the outputted frequency difference of said dual-frequency laser can to continuously tuned from 1MHz to hundreds MHz; when the target mirror or the measured object moves each 1/8 optical wavelength along with the surface of the measured target, the polarization state of light outputted from the light source varies once. In the range of one cycle from the traceable source to the natural reference, four different polarization states are sequentially appeared, which are parallel ray independent oscillation, parallel ray and vertical ray commonly oscillation, vertical ray independent oscillation and non oscillation; based on the four different polarization states, estimating the bias size and direction of the measured object. |
Claim： |
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PCT： |
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